振動片、振動子、発振器及び電子機器

Vibrator element, vibrator, oscillator, and electronic device

Abstract

PROBLEM TO BE SOLVED: To maintain the Q value of a vibrator element including vibrating arms that vibrate in the thickness direction thereof, and provide a vibrator, an oscillator, and an electronic device each including a vibrator element in which the Q value thereof is maintained.SOLUTION: A quartz crystal vibrator element 1 includes a base portion 10 and three vibrating arms 11a, 11b, and 11c that extend from the base portion 10 in a Y-axis direction. The vibrating arms 11a, 11b, and 11c are arranged in an X-axis direction perpendicular to the Y-axis direction, respectively include excitation electrodes 12a, 12b, and 12c on a principal face 10a along a plane defined by the Y-axis direction and the X-axis direction, and vibrate in a Z-axis direction perpendicular to the principal face 10a. When an arm width of the vibrating arm 11b, which is located in the middle of the arrangement of the vibrating arms 11a, 11b, and 11c, in the X-axis direction is W1, each arm width of the vibrating arms 11a and 11c in the X-axis direction is W, an electrode width of the excitation electrode 12b of the vibrating arm 11b in the X-axis direction is A1, and each electrode width of the excitation electrodes 12a and 12c of the vibrating arms 11a and 11c in the X-axis direction is A, 1.35<W1/W<1.90 and 1.35<A1/A<1.90.
【課題】厚さ方向に振動する振動腕を備えた振動片のQ値の維持、及びQ値が維持された振動片を備えた振動子、発振器、電子機器の提供。 【解決手段】水晶振動片1は、基部10と、基部10からY軸方向に延びる3本の振動腕11a,11b,11cと、を備え、振動腕11a,11b,11cは、Y軸方向と直交するX軸方向に配列されると共に、Y軸方向とX軸方向とで特定される平面に沿った主面10aに励振電極12a,12b,12cを有し、主面10aと直交するZ軸方向に振動し、振動腕11a,11b,11cの内、配列の中央に位置する振動腕11bのX軸方向の腕幅をW1、振動腕11a,11cのX軸方向の腕幅をWとし、振動腕11bの励振電極12bのX軸方向の電極幅をA1、振動腕11a,11cの励振電極12a,12cのX軸方向の電極幅をAとしたとき、1.35<W1/W<1.90、且つ、1.35<A1/A<1.90である。 【選択図】図1

Claims

Description

Topics

Download Full PDF Version (Non-Commercial Use)

Patent Citations (3)

    Publication numberPublication dateAssigneeTitle
    JP-2001196891-AJuly 19, 2001Citizen Watch Co Ltd, シチズン時計株式会社Vibrator
    JP-2009118217-AMay 28, 2009Epson Toyocom Corp, Seiko Epson Corp, エプソントヨコム株式会社, セイコーエプソン株式会社Piezoelectric vibrating piece
    JP-2010193331-ASeptember 02, 2010Epson Toyocom Corp, エプソントヨコム株式会社Vibrating piece and vibrator

NO-Patent Citations (0)

    Title

Cited By (0)

    Publication numberPublication dateAssigneeTitle